Method and apparatus for separating liquid in a semiconductor cleaning device
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United States of America Patent
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N/A
Issued Date -
Sep 12, 2002
app pub date -
Mar 8, 2001
filing date -
Mar 8, 2001
priority date (Note) -
Abandoned
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Abstract
A method and apparatus for separating fluid from exhaust air in a semiconductor cleaning device implements a separator box having at least one mesh layer disposed therein to assist in preventing separated fluid from entering exhaust ducting. The mesh layer reduces the amount of splashing and assists in maintaining an even air flow. Additional layers of mesh may be disposed above the first mesh layer to further assist in reducing fluid from entering exhaust ducting.
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