Micro-electro-mechanical high frequency switch and method for manufacturing the same
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United States of America Patent
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Issued Date -
Sep 12, 2002
app pub date -
Dec 28, 2001
filing date -
Dec 29, 2000
priority date (Note) -
Abandoned
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Abstract
A micro-electro-mechanical high frequency switch and method for manufacturing the high frequency switch, comprising the steps of: providing a substrate; forming a metal transmission line and a driving electrode on the substrate; forming a dielectric layer on said metal transmission line and said driving electrode; forming a micro-electro-mechanical switch; forming driving electrodes on and beneath the micro-electro-mechanical switch; such that the driving voltage of high frequency switch is reduced, the insertion loss is lowered, the isolation is high, and the functions of high frequency switch is improved.
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