Flexible bending member for a workpiece carrier apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 27, 2002
app pub date -
Dec 26, 2000
filing date -
Dec 26, 2000
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Loading Importance Indicators... 
Abstract
A flexible membrane for a wafer polishing apparatus has a central contact portion, an annular bending element connected to the central contact portion and an outer annual ring connected to the annular bending element. The membrane is configured to apply uniform pressure to a workpiece during polishing.
Loading the Abstract Image...
OK
First Claim
Family
Loading Family data...
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully