Reinforced CMP carrier bladders
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jun 20, 2002
app pub date -
Dec 15, 2000
filing date -
Dec 15, 2000
priority date (Note) -
Abandoned
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Abstract
A reinforced bladder for a chemical-mechanical planarization (CMP) polishing device includes an elastomer infused with a reinforcing material. The elastomer can be a rubber such as EPDM. The reinforcing material can be a chopped fiber such as aramid. Alternatively, the reinforcing material can be a sheet (such as a triaxial or hexaxial weave of aramid) embedded in and infused with the elastomer.
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