Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MITSUBISHI CHEMICAL CORPORATION	1-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-8251
NIPPON KASEI CHEMICAL COMPANY LIMITED	FUKUSHIMA-KEN

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• C03C:CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREO....
• C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....
• B44C:PRODUCING DECORATIVE EFFECTS
• C25F:PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIAL....

• 2001 Application Filing Year
• H01L Class
• 12651 Applications Filed
• 6832 Patents Issued To-Date
• 54.01 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Haga, Sadao	Kitakyushu-shi, JP	1	8
# of filed Patents : 1 Total Citations : 8
Itou, Katsuji	Iwaki-shi, JP	4	30
# of filed Patents : 4 Total Citations : 30

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

• 8 Citation Count
• H01L Class

• 1.35 % this patent is cited more than
• 23 Age

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2002/0072,235

Mixed acid solution in etching process, process for producing the same, etching process using the same and process for producing semiconductor device

---

Abstract

---

There is disclosed an etching solution containing at least hydrofluoric acid, nitric acid and hexafluorosilicic acid wherein the concentration of hexafluorosilicic acid is not less than 10% by weight based on the weight of the etching solution.

---

 

---

Description

---

Claims

---

Claims data not available

---

Legal Events

• No Legal Status data available.