Magnetic scanning system with a nonzero field
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United States of America Patent
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N/A
Issued Date -
May 2, 2002
app pub date -
Oct 19, 2001
filing date -
Oct 20, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus and a method are disclosed for producing a magnetic deflection field in an ion implanter that drives a secondary solenoid field 90 degrees out of phase with the magnetic deflection field. The apparatus has a magnetic structure including two cores and a yoke, the two cores defining a gap therebetween. The magnetic structure being constructed of a ferrimagnetic material to reduce eddy currents. A deflection coil is positioned inside the gap for producing a time-varying magnetic field in the gap and a secondary helical coil is also positioned inside the gap and extends longitudinally for a portion of the gap. The secondary helical coil produces a solenoid magnetic field that is coupled to the magnetic field associated with the deflection coil. A capacitor is associated with the secondary helical coil and tunes the solenoid magnetic field to the fundamental frequency of the magnetic field associated with the deflection coil.
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