ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD
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United States of America Patent
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N/A
Issued Date -
Mar 28, 2002
app pub date -
May 7, 1999
filing date -
May 7, 1999
priority date (Note) -
Abandoned
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Abstract
An electrostatic chuck 55 comprises an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive a substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. The base 175 comprises a composite of a plurality of materials, such as, ceramic and metal, for example silicon carbide and aluminum. Optionally, a support 190 can be provided to support the base 175.
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