Single crystal silicon micro-actuator/mirror and method therefor
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United States of America Patent
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Issued Date -
Jan 31, 2002
app pub date -
May 11, 2001
filing date -
May 12, 2000
priority date (Note) -
Abandoned
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Abstract
A simple method for making large, uniformly flat electrostatically actuated micro-mirrors for use as variable attenuators and switches in optical networking systems is disclosed. The devices are fabricated by fusion bonding ultra-thin, single crystal silicon wafers to micromachined silicon substrates, forming robust, non-deforming reflective surfaces which are simpler to fabricate than similar devices fabricated by conventional chemical vapor deposition of polycrystalline silicon, which require careful engineering to avoid stress-induced deformation.
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