Apparatus and method for controlling boiling conditions of hot phosphoric acid solution with pressure adjustment

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United States of America Patent

PATENT NO 6758940
APP PUB NO 20020007803A1
SERIAL NO

09796166

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Abstract

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Disclosed is an apparatus and method for controlling boiling condition of hot H.sub.3 PO.sub.4 solution by adjusting the vapor extracting rate thereof, wherein an acid tank filled with hot H.sub.3 PO.sub.4 solution to a level surface is located in a treatment room and a temperature thermocouple is arranged above the level surface of the hot H.sub.3 PO.sub.4 solution to monitor the vapor temperature near the level surface of the H.sub.3 PO.sub.4 solution. The vapor temperature is used to adjust the extracting rate of the treatment room by control of a damper connected to an outlet of the treatment room. According to the present invention, the treatment apparatus and method can control the boiling condition of the hot H.sub.3 PO.sub.4 solution thereof by properly adjusting the extracting rate, and therefore avoid defects and loss of control in manufacturing processes.

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Patent Owner(s)

Patent OwnerAddress
PROMOS TECHNOLOGIES INC3F NO 19 LI-HSIN ROAD SCIENCE-BASED INDUSTRIAL PARK HSIN CHU CITY

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  • 2001 Application Filing Year
  • C23F Class
  • 479 Applications Filed
  • 107 Patents Issued To-Date
  • 22.34 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2001200220032004200520062007200820092010201120120255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, John Hsinchu, TW 18 429

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  • 7 Citation Count
  • C23F Class
  • 5 % this patent is cited more than
  • 21 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges9932717167142401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7081 - 90100 +05101520253035404550556065707580859095100

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