METHOD FOR IMPROVING THERMAL STABILITY OF FLUORINATED AMORPHOUS CARBON LOW DIELECTRIC CONSTANT MATERIALS
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United States of America Patent
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app pub date -
Jul 1, 1998
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Jul 1, 1998
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Abstract
A process for forming a thermally stable low-dielectric constant material is provided. A gas mixture is prepared to form a fluorinated amorphous carbon (a-C:F) material. The gas mixture is mixed with a boron-containing gas.
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