Spatial filter source beam conditioning in ellipsometer and the like systems
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United States of America Patent
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Issued Date -
Nov 29, 2001
app pub date -
May 14, 2001
filing date -
May 26, 2000
priority date (Note) -
Abandoned
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Abstract
Disclosed is the application of spatial filter(s) in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
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