UV-enhanced, in-line, infrared phosphorous diffusion furnace
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 18, 2001
app pub date -
Feb 26, 2001
filing date -
Oct 20, 1998
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A thermal processing apparatus for thermally processing a workpiece having a process chamber, a workpiece support positioned inside of the process chamber, a heater positioned inside of the process chamber to heat the workpiece; and an ultraviolet light source positioned inside of the process chamber to irradiate ultraviolet light onto the workpiece.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully