X-ray spectroscopic analyzer having sample surface observation mechanism
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United States of America Patent
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Issued Date -
Sep 13, 2001
app pub date -
Mar 7, 2001
filing date -
Mar 7, 2000
priority date (Note) -
Abandoned
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Abstract
An X-ray spectroscopic analyzer having a mechanism for observing a sample surface, for analyzing a sample 3 by irradiating X-ray 4 thereupon within a chamber 2, comprises: a viewer apparatus 11 for letting the sample to be viewed; and an illumination means 31 for illuminating a surface of the sample 3, by irradiating an illuminating light B upon the surface of the sample 3 obliquely, while suppressing an incidence of a reflecting light of the illuminating light B upon the viewer apparatus 11. With such the construction, a shape of a contaminated portion, a residue or the like, upon the sample surface, can be clearly observed under dark field on the viewer apparatus 11, while keeping the sample 3 set within the x-ray spectroscopic analyzer 1.
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