Ceramic heater and method of manufacturing the same
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United States of America
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Apr 1, 2025
Grant Date -
Dec 2, 2021
app pub date -
Aug 10, 2021
filing date -
Aug 10, 2021
priority date (Note) -
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Abstract
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.
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