Transversely-excited film bulk acoustic resonators with three-layer electrodes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12267062
APP PUB NO 20210399714A1
SERIAL NO

17108809

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Abstract

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There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers comprise a first layer proximate the diaphragm, a second layer over the first layer, and a third layer over the second layer, wherein adjacent layers are different materials.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garcia, Bryant Burlingame, US 127 2732
Koskela, Julius Helsinki, FI 53 1078

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