Atomic layer etching for subtractive metal etch

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12266542
APP PUB NO 20240186150A1
SERIAL NO

18435244

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Abstract

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A method for atomic layer etching a metal containing layer is provided. At least a region of a surface of the metal containing layer is modified to form a modified metal containing region by exposing a surface of the metal containing layer to a modification gas, wherein adjacent to the modified metal containing region remains an unmodified metal containing region. The modified metal containing region is selectively removed with respect to the unmodified metal containing region by exposing the surface of the metal containing layer to an inert bombardment plasma generated from an inert gas.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brouri, Mohand Brussels, BE 6 14
Choi, Wook San Jose, US 32 240
Fan, Yiwen Fremont, US 10 14
Lee, Shih-Ked Fremont, US 40 746
Lin, Ran Fremont, US 34 159
Mukherjee, Tamal Beaverton, US 14 33
Pan, Yang Los Altos, US 310 4868
Tan, Samantha SiamHwa Newark, US 41 122
Yang, Wenbing Campbell, US 38 1271

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