Manufacturing method of an element of an electronic device having improved reliability, and related element, electronic device and electronic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12266530
APP PUB NO 20240203737A1
SERIAL NO

18395174

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Abstract

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A manufacturing method of an anchorage element of a passivation layer, comprising: forming, in a semiconductor body made of SiC and at a distance from a top surface of the semiconductor body, a first implanted region having, along a first axis, a first maximum dimension; forming, in the semiconductor body, a second implanted region, which is superimposed to the first implanted region and has, along the first axis, a second maximum dimension smaller than the first maximum dimension; carrying out a process of thermal oxidation of the first implanted region and second implanted region to form an oxidized region; removing said oxidized region to form a cavity; and forming, on the top surface, the passivation layer protruding into the cavity to form said anchorage element fixing the passivation layer to the semiconductor body.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LAGRATE BRIANZA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rascuna', Simone Catania, IT 32 22
Saggio, Mario Giuseppe Aci Bonaccorsi, IT 82 188

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