Nanopositioning systems and associated methods
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United States of America
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Apr 1, 2025
Grant Date -
Jan 12, 2023
app pub date -
Nov 27, 2020
filing date -
Nov 27, 2020
priority date (Note) -
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Abstract
A nanoscale positioning system for positioning a positionable component includes a motion platform including a first end, a second end, a shuttle positioned between the first end and the second end and configured to support the positionable component, a flexure member, and a fluid passage extending through the flexure member from the first end to the second end of the motion platform, and a pressure controller coupled to the motion platform and fluidically connected to the fluid passage, wherein the pressure controller is configured to selectably provide a fluid pressure in the fluid passage to flex the flexure member whereby the shuttle is displaced along a motion axis of the motion platform.
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