EUV mask blank and method of making EUV mask blank

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12265322
APP PUB NO 20230375911A1
SERIAL NO

18365757

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Abstract

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An extreme ultraviolet mask including a substrate, a reflective multilayer stack on the substrate and a capping layer on the reflective multilayer stack is provided. The reflective multilayer stack is treated prior to formation of the capping layer on the reflective multilayer stack. The capping layer is formed by an ion-assisted ion beam deposition or an ion-assisted sputtering process.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chia-Jen Hsinchu, TW 98 1413
Hsu, Pei-Cheng Hsinchu, TW 111 530
Lee, Hsin-Chang Hsinchu, TW 203 1090
Lien, Ta-Cheng Hsinchu, TW 104 198
Lin, Ping-Hsun Hsinchu, TW 33 21
Yu, Ching-Fang Hsinchu, TW 20 183

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