Particle measuring device
Number of patents in Portfolio can not be more than 2000
United States of America
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Apr 1, 2025
Grant Date -
May 18, 2023
app pub date -
Nov 14, 2022
filing date -
Nov 14, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A particle measuring device includes a probe including a nozzle spraying a gas on a surface of an object and an inlet inhaling the gas and particles scattered from the surface by the gas; a main pipe including an inflow hole through which the gas flows and a discharge hole through which the gas is discharged; a first manifold provided to connect the main pipe to the nozzle, and supplying the gas to the nozzle; a second manifold provided to connect the main pipe to the inlet between a connecting portion of the first manifold and the discharge hole, and supplying the particles and the gas to the main pipe; a third manifold branched from the second manifold and supplying the particles and the gas; and a particle counter connected to the third manifold, and counting the particles included in the gas supplied through the third manifold.
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