Method for manufacturing mirror device
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Apr 1, 2025
Grant Date -
Mar 21, 2024
app pub date -
Aug 24, 2020
filing date -
Aug 24, 2020
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method for manufacturing a mirror device, the method includes a first step of preparing a wafer having a support layer, a device layer, and an intermediate layer; a second step of forming a slit in the wafer such that the movable portion becomes movable with respect to the base portion by removing a part of each of the support layer, the device layer, and the intermediate layer from the wafer and forming a plurality of parts each corresponding to the structure in the wafer, after the first step; a third step of performing wet cleaning using a cleaning liquid after the second step; and a fourth step of cutting out each of the plurality of parts from the wafer after the third step. In the second step, a part of the intermediate layer is removed from the wafer by anisotropic etching.
First Claim
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International Classification(s)
- 2020 Application Filing Year
- B81C Class
- 326 Applications Filed
- 187 Patents Issued To-Date
- 57.37 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B81C Class
- 0 % this patent is cited more than
- < 1 Age
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