Dual arm robot

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12263587
APP PUB NO 20230330839A1
SERIAL NO

18191472

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
BROOKS AUTOMATION US LLC15 ELIZABETH DRIVE CHELMSFORD MA 01824

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caveney, Robert T Windham, US 91 1670
Elliot, Martin R Austin, US 9 93
Hofmeister, Christopher Harleyville, US 132 3216
Krupyshev, Alexander G Chelmsford, US 20 190

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