Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices
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United States of America
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Apr 1, 2025
Grant Date -
Mar 28, 2024
app pub date -
Dec 6, 2023
filing date -
Dec 6, 2023
priority date (Note) -
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Abstract
An ultrasound transducer device made by a process that includes the steps of forming depositing a first layer on a substrate, depositing a second layer on the first layer, patterning the second layer at a region corresponding to a location of a transducer cavity, depositing a third layer that refills regions created by patterning the second layer, planarizing the third layer to a top surface of the second layer, removing the second layer, conformally depositing a fourth layer over the first layer and the third layer, defining the transducer cavity in a support layer formed over the fourth layer; and bonding a membrane to the support layer.
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