Gas solution supply device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12263452
APP PUB NO 20220105478A1
SERIAL NO

17488814

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A gas solution supply device 1 includes: a first gas-liquid separator 8 in which gas solution is stored; a second gas-liquid separator 16 provided at a stage subsequent to the first gas-liquid separator 8 and in which gas solution to be supplied to a use point is stored; an intermediate line 17 provided between the first gas-liquid separator 8 and the second gas-liquid separator 16; a pressure booster pump 18 provided on the intermediate line 17 and increases a pressure of gas solution being supplied from the first gas-liquid separator 8 to the second gas-liquid separator 16; a gas supply line 2 that supplies gas as a material of the gas solution; and a gas dissolving unit 20 provided on the intermediate line 17 and dissolves the gas supplied from the gas supply line 2 in the gas solution supplied from the first gas-liquid separator 8.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 144-8510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Araki, Yuji Tokyo, JP 44 1514
Kimura, Risa Tokyo, JP 9 2
Nakagawa, Yoichi Tokyo, JP 97 1488
Ozawa, Suguru Tokyo, JP 25 86
Watanabe, Toshifumi Tokyo, JP 70 575
Xu, Tao Tokyo, JP 336 2428

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