Methods and systems to improve uniformity in power FET arrays

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12262557
APP PUB NO 20220328476A1
SERIAL NO

17707839

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Abstract

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A vertical, fin-based field effect transistor (FinFET) device includes an array of individual FinFET cells. The array includes a plurality of rows and columns of separated fins. Each of the separated fins is in electrical communication with a source contact. The vertical FinFET device also includes one or more rows of first inactive fins disposed on a first set of sides of the array of individual FinFET cells, one or more columns of second inactive fins disposed on a second set of sides of the array of individual FinFET cells, and a gate region surrounding the individual FinFET cells of the array of individual FinFET cells, the first inactive fins, and the second inactive fins.

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Patent Owner(s)

  • SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cui, Hao Santa Clara, US 83 993
Drowley, Clifford Santa Clara, US 36 11
Edwards, Andrew P Santa Clara, US 80 446
Pidaparthi, Subhash Srinivas Santa Clara, US 33 15

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