Surface acoustic wave resonator device and method for manufacturing the same and filter

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United States of America

PATENT NO 12261586
APP PUB NO 20240204749A1
SERIAL NO

18418709

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Abstract

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A surface acoustic wave resonator device, and method for manufacturing the same and filter, the method includes: forming an interdigital transducer including interdigital electrodes on the piezoelectric substrate; forming the interdigital transducer includes: forming initial interdigital electrodes on the piezoelectric substrate, wherein each initial interdigital electrode has a first width, and every two adjacent initial interdigital electrodes have an initial interdigital gap with a first spacing therebetween; and forming additional interdigital electrodes on the piezoelectric substrate, wherein each initial interdigital gap has a portion filled by one of additional interdigital electrodes; each interdigital electrode includes an initial interdigital electrode and an additional interdigital electrode connected to each other; each interdigital electrode has a second width, and every two adjacent interdigital electrodes have a second spacing therebetween; the second width is greater than the first width, and the second spacing is smaller than the first spacing.

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Patent Owner(s)

Patent OwnerAddress
SHENZHEN NEWSONIC TECHNOLOGIES CO LTD518110 508 ZHONGKE BUILDING GAOXIN SOUTH 1ST ROAD NANSHAN DISTRICT SHENZHEN CITY GUANGDONG PROVINCE SHENZHEN CITY GUANGDONG PROVINCE 518110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tang, Gongbin Shenzhen, CN 20 4
Zhou, Chencheng Shenzhen, CN 6 2
Zou, Jie Guangdong, CN 63 1312

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