Control method and system for stabilizing excimer laser pulse energy

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United States of America

PATENT NO 12261407
APP PUB NO 20210359487A1
SERIAL NO

17389400

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Abstract

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A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.

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Patent Owner(s)

Patent OwnerAddress
BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO LTD100176 1ST FLOOR BUILDING 4 ZHONGHUAN ENGINEERING YARD 19 RONGXING NORTH 1ST STREET ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE DAXING DISTRICT BEIJING BEIJING CITY BEIJING CITY 100176

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feng, Zebin Beijing, CN 2 0
Han, Xiaoquan Beijing, CN 5 64
Jiang, Rui Beijing, CN 39 83
Liao, Mi Beijing, CN 1 0
Wang, Xiang Beijing, CN 215 1154
Yang, Junhong Beijing, CN 2 0
Zhang, Hua Beijing, CN 534 3218
Zhang, Qin Beijing, CN 235 2277

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