Thermoelectric cooling of semiconductor devices

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United States of America

PATENT NO 12261199
APP PUB NO 20230052136A1
SERIAL NO

17834289

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Abstract

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An integrated circuit (IC) device includes a chip having a semiconductor substrate and a thermoelectric module embedded in the semiconductor substrate, where the thermoelectric module includes a first semiconductor structure electrically connected to a second semiconductor structure, where a bottom portion of thermoelectric module extends through a thickness of the semiconductor substrate, and where the first semiconductor structure and the second semiconductor structure include dopants of different conductivity types.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Jen-Yuan Hsinchu, TW 175 215
Jiang, Jheng-Hong Hsinchu, TW 36 7
Lin, Long Song Hsinchu, TW 4 0
Liu, Chin-Chou Hsinchu County, TW 101 462

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