Optical heating apparatus with angled light holding substrate and heating treatment method thereof
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United States of America
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Mar 25, 2025
Grant Date -
Apr 6, 2023
app pub date -
May 30, 2022
filing date -
May 30, 2022
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Abstract
An optical heating apparatus includes a supporter on which a workpiece is placed and a plurality of light source units each including an LED substrate on which multiple LED elements are mounted. A first main surface of the LED substrate fails to be parallel to a second main surface of the workpiece. Each of the light source units is arranged to satisfy the following formula: 2 tan 2θ/cos θ≥D2/D1, where θ is an angle formed by the first main surface and the second main surface, D1 is a separation distance between a first LED element and the workpiece, D2 is a separation distance between the first LED element and a second LED element, the first LED element being closest to the second main surface in a normal direction thereof, and the second LED element being farthest to the second main surface in the normal direction thereof.
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