Top via patterning using metal as hard mask and via conductor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12261056
APP PUB NO 20230067493A1
SERIAL NO

17460624

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Abstract

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A semiconductor structure comprising a substrate, a first metal layer on top of the substrate, a second metal layer on top of the first metal layer and a dielectric layer adjacent to the second metal layer and at least part of the first metal layer and on top of at least part of the first metal layer. The first metal layer includes a via. The width of the second metal layer is the same as the width of the via of the first metal layer.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clevenger, Lawrence A Saratoga Springs, US 787 5051
Huang, Huai Clifton Park, US 121 221
Lanzillo, Nicholas Anthony Wynantskill, US 194 42
Park, Chanro Clifton Park, US 420 2938
Shobha, Hosadurga Niskayuna, US 109 510

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