Doping techniques

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12261047
APP PUB NO 20220375753A1
SERIAL NO

17882177

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Abstract

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A method of selectively and conformally doping semiconductor materials is disclosed. Some embodiments utilize a conformal dopant film deposited selectively on semiconductor materials by thermal decomposition. Some embodiments relate to doping non-line of sight surfaces. Some embodiments relate to methods for forming a highly doped crystalline semiconductor layer.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aderhold, Wolfgang Cupertino, US 32 518
Colombeau, Benjamin San Jose, US 75 433
Huang, Yi-Chiau Fremont, US 74 6035
Liu, Wei San Jose, US 1976 15390
Mayur, Abhilash Salinas, US 12 153

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