Gapfill of variable aspect ratio features with a composite PEALD and PECVD method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12261038
APP PUB NO 20220059348A1
SERIAL NO

17465555

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Abstract

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Provided herein are methods and apparatus for filling one or more gaps on a semiconductor substrate. The disclosed embodiments are especially useful for forming seam-free, void-free fill in both narrow and wide features. The methods may be performed without any intervening etching operations to achieve a single step deposition. In various implementations, a first operation is performed using a novel PEALD fill mechanism to fill narrow gaps and line wide gaps. A second operation may be performed using PECVD methods to continue filling the wide gaps.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hausmann, Dennis M Lake Oswego, US 73 10737
Kang, Hu Tualatin, US 62 8808
Kim, Wanki Portland, US 50 2379
LaVoie, Adrien Newberg, US 198 18204
Qian, Jun Sherwood, US 175 7315
Swaminathan, Shankar Beaverton, US 111 12669
van, Schravendijk Bart J Palo Alto, US 91 8614

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