Electron detection device and scanning electron microscope

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United States of America

PATENT NO 12261016
SERIAL NO

19008683

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Abstract

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Provided are an electron detection device and a scanning electron microscope. The electron detection device includes: a reflective energy analyzer including first and second control electrodes that are sequentially arranged in an incidence direction of an electron beam; a first detector disposed at a side of the second control electrode away from the first control electrode; a second detector disposed at a side of the first control electrode away from the second control electrode; and a conductive shielding tube penetrating the first and second control electrodes in the incidence direction and configured to shield an electric field generated by the reflective energy analyzer, allowing the electron beam to pass through and be incident on the target sample. First control electrode is configured to generate a first electric field between the first and second control electrodes. The first electric field is configured to guide the secondary electron to the first detector.

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Patent Owner(s)

Patent OwnerAddress
CIQTEK CO LTDFLOOR 1-4 BLOCK A BUILDING E2 INNOVATION INDUSTRIAL PARK II 2800 INNOVATION AVENUE GAOXIN DISTRICT HEFEI ANHUI 230088

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cao, Feng Anhui, CN 106 842
He, Yu Anhui, CN 79 542
Li, Tianjun Anhui, CN 2 0
Sun, Bin Anhui, CN 110 267
Yin, Da Anhui, CN 1 0
Zhang, Wei Anhui, CN 2625 19909

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