Advanced pressure based mass flow controllers and diagnostics
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United States of America
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Mar 25, 2025
Grant Date -
Nov 5, 2020
app pub date -
Nov 19, 2019
filing date -
Nov 19, 2019
priority date (Note) -
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Abstract
A mass flow controller for controlling flow rate comprising a controller, a valve assembly, and at least one pressure sensor, valve position sensor, and temperature sensor; wherein, at least one of the sensors is a semiconductor based sensor. The valve assembly is in fluid communication with at least one upstream location and at least one downstream location. The at least one pressure sensor is in in fluid communication with the at least one upstream location and the at least one downstream location. The valve assembly can comprise at least one piezoelectric or solenoid valve. The controller is communicable coupled with the valve assembly and at least one of the sensors. The controller determines at least one of: pressure; position; and temperature. The controller further causes an adjustment to valve stroke based on an actual fluid flow rate and at least one of the pressure, position, temperature, and a predetermined value.
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