Template, method for fabricating template, and method for fabricating semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12259663
APP PUB NO 20220050392A1
SERIAL NO

17399854

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Abstract

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A template includes: a base material having a principal surface; a mesa structure provided on the principal surface and having a first surface; and a silicon film that is provided on the first surface of the mesa structure, has a projection-and-depression pattern, and is made of a material different from a material for the base material.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATIONTOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komukai, Toshiaki Kanagawa, JP 14 89

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