Silicon-based optical device and method of fabricating the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12259604
APP PUB NO 20240329435A1
SERIAL NO

18191859

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Abstract

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A method of fabricating an optical device comprises steps of forming a silicon-based optical component in a substrate; depositing an ILD layer on the substrate and the silicon-based optical component; forming a thermal tuning assembly comprising a first metallic material in the ILD layer and above the silicon-based optical component, wherein the thermal tuning assembly comprises a core above the silicon-based optical component, a plurality of grids spaced apart from the core, and a pair of neck portions connecting the grids to the core, wherein a width of a strip in each grid is greater than a width of the core; forming at least one conductive plug comprising the first metallic material penetrating the ILD layer and coupled to the silicon-based optical component; and forming a plurality of conductive lines comprising a second metallic material coupled to the thermal tuning assembly.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lo, Wen-Shun Hsinchu County, TW 32 65
Tsui, Yingkit Felix Cupertino, US 48 6
Yang, Jing-Hwang Hsinchu County, TW 20 120

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