Micromirror arrays

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12259546
APP PUB NO 20220342199A1
SERIAL NO

17634023

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Abstract

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A micromirror array includes a substrate, a plurality of mirrors for reflecting incident radiation, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the respective mirror. The micromirror array further includes, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the respective post to displace the respective post relative to the substrate, thereby displacing the respective mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH
IMECKAPELDREEF 75 LEUVEN B-3001

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brondani, Torri Guilherme Leuven, BE 3 0
Goorden, Sebastianus Adrianus Eindhoven, NL 46 49
Halbach, Alexandre Leuven, BE 6 52
Haspeslagh, Luc Roger Simonne Linden, BE 5 8
Pandey, Nitesh Eindhoven, NL 63 188
Rochus, Veronique Leuven, BE 19 34

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