Test device and probe polishing method
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Mar 25, 2025
Grant Date -
Apr 28, 2022
app pub date -
Oct 20, 2021
filing date -
Oct 20, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A test device for testing a substrate is provided. The device comprises: a mounting table for test on which the substrate under test is mounted; a transportation mechanism to transport the substrate under test; a mounting table for polishing on which a polishing substrate is mounted; a first forward or backward movement mechanism to move the mounting table for test with respect to a probe; and a second forward or backward movement mechanism to move the mounting table for polishing with respect to the probe, wherein the mounting table for polishing is provided separately from the mounting table for test, a retreat region of the mounting table for test is opposite to a retreat region of the mounting table for polishing, and the second forward or backward movement mechanism is configured such that a portion of the polishing substrate overlaps the probe while the other portion of the polishing substrate does not overlap the probe.
First Claim
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Family
International Classification(s)
- 2021 Application Filing Year
- B24B Class
- 635 Applications Filed
- 250 Patents Issued To-Date
- 39.38 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B24B Class
- 0 % this patent is cited more than
- < 1 Age
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