Harmonic load pull tuner
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United States of America
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Mar 25, 2025
Grant Date -
N/A
app pub date -
Feb 24, 2023
filing date -
Feb 24, 2023
priority date (Note) -
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Abstract
A low profile four probe harmonic load-pull slide screw impedance tuner uses four tuning probes sharing the same slabline; they are inserted in pairs diametrically at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable vertical axes controlling the penetration of the tuning probes and its low profile is optimal for on-wafer operations with direct wafer probe contact. The carriages holding the tuning probes are moved at high speed along the slabline using linear electric actuators. The “S” shaped center conductor allows for a neutral, probe withdrawn, 50 Ohm state. A fast de-embedding calibration method allows speeding up the measurement procedure.
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