Low hysteresis and flexible pressure sensitive composite
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United States of America
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Mar 25, 2025
Grant Date -
Apr 28, 2022
app pub date -
Feb 7, 2020
filing date -
Feb 7, 2020
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Abstract
A sensing structure and a method of fabricating a sensing structure for a compressive-type pressure sensor. The method comprises the steps of providing an elastic micropatterned substrate defining a plurality of 3-dimensional microstructures, each microstructure comprising a tip portion pointing away from the substrate in a first direction; forming a conductive film on the elastic micropatterned substrate such that the 3-dimensional microstructures are substantially covered by the conductive film; and forming cracks in the conductive film in areas on 3-dimensional microstructures.
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