Gallium nitride single crystal substrate

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United States of America

PATENT NO 12258678
APP PUB NO 20240376636A1
SERIAL NO

18619371

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Abstract

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There is provided a gallium nitride single crystal substrate, which is a gallium nitride single crystal substrate that has a diameter of 50 mm or more and whose low index crystal plane closest to a main surface is a (0001) plane, wherein a density of etch pits when applying etching to the main surface with an alkaline etching solution is less than 1×106 cm−2, and among peaks appearing in a histogram of diameters of the etch pits, when a diameter of a first peak appearing on a smallest diameter-side is a, a total number of the etch pits with a diameter exceeding 4a is 1/1000 or less of a number of etch pits forming the first peak.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDCHUO-KU TOKYO 104-8260

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimoto, Tetsuji Hitachi, JP 3 50
Kitamura, Toshio Hitachi, JP 46 168
Sato, Takashi Hitachi, JP 973 9680
Shibata, Masatomo Hitachi, JP 46 745

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