Substrate inspection system and a method of use thereof
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United States of America
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Mar 25, 2025
Grant Date -
Mar 28, 2024
app pub date -
Dec 5, 2023
filing date -
Dec 5, 2023
priority date (Note) -
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Abstract
This application relates to a method of inspection and an inspection system for the film deposition process for substrates that includes glass and wafer. The inspection system includes multiple camera modules positioned in a load lock unit of a process chamber, such as the camera modules that can capture images of the substrate in the load lock. The images are analyzed by a control unit of the inspection system to determine the accuracy of robots in handling the substrate, calibration of the robots based on the analysis, and defects in the substrate caused during the handling and deposition process.
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