Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12258661
APP PUB NO 20230067917A1
SERIAL NO

17760310

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Abstract

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The invention relates to a device and a method for producing layers whose layer thickness distribution can be adjusted in coating systems with horizontally rotating substrate. A very homogeneous or a specific non-homogeneous distribution can be adjusted. The particle loading is also significantly reduced. The service life is significantly higher compared to other methods. Forming of parasitic coatings is reduced.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRASSE 27 C 80686 MÜNCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bruns, Stefan Braunschweig, DE 10 33
Pflug, Andreas Braunschweig, DE 10 13
Vergöhl, Michael Braunschweig, DE 12 27
Zickenrott, Tobias Braunschweig, DE 4 5

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