Polishing liquid, polishing liquid set, and polishing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12258491
APP PUB NO 20230203342A1
SERIAL NO

17771919

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Abstract

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A polishing liquid containing: abrasive grains; at least one hydroxy acid component selected from the group consisting of a hydroxy acid and a salt thereof; and a compound Z, in which the compound Z has a hydrocarbon group which may be substituted and a polyoxyalkylene group, and a Z value represented by General Formula (1) below is 20 or more:

description='In-line Formulae' end='lead'Z=0.1×a2×b/c  (1)description='In-line Formulae' end='tail'

[in Formula (1), “a” represents the number of carbon atoms of the hydrocarbon group, “b” represents the total number of oxyalkylene groups in the compound Z, and “c” represents an HLB value of the compound Z.]

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Patent Owner(s)

  • RESONAC CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hasegawa, Tomoyasu Tokyo, JP 23 106
Iwano, Tomohiro Tokyo, JP 56 332
Kukita, Tomomi Tokyo, JP 20 24

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