Microelectromechanical system (MEMS) interconnect including spring body with at least two spring arms micromachined from silicon substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12258264
APP PUB NO 20230391609A1
SERIAL NO

17805436

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Abstract

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A microelectromechanical system (MEMS) device and method of fabrication are provided. The MEMS devices includes a silicon substrate. The silicon substrate includes a top surface. An interconnect is machined from the silicon substrate. The interconnect includes at a spring body that has least two spring arms. Each spring arm includes a first end distal from a center of the interconnect, a second end proximate the center of the interconnect, and a single turn of a constant curvature. Each spring arm is configured to move rotationally in a plane parallel to the top surface of the silicon substrate.

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Patent Owner(s)

  • IBM CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adiga, Vivekananda P Ossining, US 50 87
Kumph, Muir Croton on Hudson, US 24 26

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