With low density change, phase-change memory and preparation method therefor

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PATENT NO 12256651
APP PUB NO 20220344584A1
SERIAL NO

17762742

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A superlattice phase-change thin film with a low density change, a phase-change memory and a preparation method. The superlattice phase-change thin film includes first phase-change layers (7) and second phase-change layers (8) that are alternately stacked to form a periodic structure; during crystallization, the first phase-change layer (7) has a conventional positive density change, and the second phase-change layer (8) has an abnormal negative density change, therefore, the abnormal density reduction and volume increase of the second phase-change layer (8) during crystallization can be used to offset the volume reduction of the first phase-change layer (7) during crystallization.

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Patent Owner(s)

  • HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Xiaomin Hubei, CN 17 92
Feng, Jinlong Hubei, CN 2 1
Miao, Xiangshui Hubei, CN 51 85
Xu, Meng Hubei, CN 162 1650
Xu, Ming Hubei, CN 491 9425

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