Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12255630
APP PUB NO 20220360251A1
SERIAL NO

17719311

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Abstract

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Acoustic resonators, filters, and methods. A filter includes a piezoelectric plate supported by a substrate; and three or more diaphragms of the piezoelectric plate spanning a respective cavity in the substrate. A conductor pattern on the plate has interdigital transducers (IDTs) of three or more acoustic resonators. Each IDT has two sets of interleaved fingers extending from two busbars respectively. Overlapping portions of the fingers define an aperture of each acoustic resonator. Sometimes, each of the resonators has two dielectric strips that overlap the IDT fingers in first and second margins of the aperture and that extend into first and second gaps between the first and second margins and the busbars. Other times, the first and second dielectric strips are on the front surface of the plate, have a first portion under the IDT fingers and have a second portion extending into a gap between the margins and the busbars.

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cardona, Albert Santa Barbara, US 24 14
Kay, Andrew Provo, US 81 835
Koulakis, John Los Angeles, US 13 11
McHugh, Sean Santa Barbara, US 47 176

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