Two dimensional rod resonator for RF filtering

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12255603
APP PUB NO 20240039504A1
SERIAL NO

18378254

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Abstract

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A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

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Patent Owner(s)

  • NORTHEASTERN UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cassella, Cristian Boston, US 15 102
Zhao, Xuanyi Brookline, US 5 4

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