Methods of manufacturing acoustic wave device with anti-reflection layer

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12255600
APP PUB NO 20240088865A1
SERIAL NO

18511405

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Abstract

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An acoustic wave device is disclosed. The acoustic wave device includes a piezoelectric layer, an interdigital transducer electrode positioned over the piezoelectric layer, and an anti-refection layer over a conductive layer of the interdigital transducer electrode. The conductive layer can include aluminum, for example. The anti-reflection layer can include silicon. The anti-reflection layer can be free from a material of the interdigital transducer electrode. The acoustic wave device can further include a temperature compensation layer positioned over the anti-reflection layer in certain embodiments.

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Patent Owner(s)

  • SKYWORKS SOLUTIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Tatsuya Nagaokakyo, JP 125 1023
Kabe, Yoshiro Kobe, JP 40 422
Matsuda, Satoru Toyonaka, JP 82 1425
Nagano, Kenji Ibaraki, JP 10 56

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