Piezoelectric resonator unit and oscillator provided with the same
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United States of America
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Mar 18, 2025
Grant Date -
Apr 21, 2022
app pub date -
Jan 4, 2022
filing date -
Jan 4, 2022
priority date (Note) -
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Abstract
A piezoelectric resonator unit that includes a base, a cover, and a laminated structure disposed between the base and the cover. The laminated structure includes a piezoelectric resonator having a piezoelectric layer with a pair of principal surfaces facing each other, and a pair of excitation electrodes disposed on respective surfaces of the pair of principal surfaces so as to face each other with the piezoelectric layer therebetween, a semiconductor layer laminated on a side of one of the pair of principal surfaces of the piezoelectric layer, and a pair of measurement electrodes provided on the semiconductor layer. The pair of measurement electrodes measure signals based on temperature of the piezoelectric resonator through the semiconductor layer.
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